• タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
  • タイタンテクノロジーズ株式会社
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Sensor Devices

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You are here:   HomeSensorsMass Flow Controller & MeterDigital 300 Series

Mass Flow Controller Digital 300 Series

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DIGITAL 300 SERIES

Thermal Mass Flow Controller


 

 

 

HFM-D-300A / HFC-D-302A

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All Metal, Fast Response, Tight Accuracy! Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.

HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.

Self-diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.

 


± (0.5% of reading + 0.2% of full scale) Accuracy

 

Applications and Industries

 

Leak Testing

Thin Film Deposition

High Purity Gas Delivery

Thermal Flame Spray

Gas Blending

Pharmaceutical Process

 

HFM-D-300A Meter

HFC-D-302A Controller

​Range

0 - 5 sccm to 0 - 25 slm (N2)

​0 - 5 sccm to 0 - 25 slm (N2)

Accuracy

+ (0.5% of reading + 0.2% of full scale)

+ (0.5% of reading + 0.2% of full scale)

​Repeatability

+ 0.15% of F.S.

+ 0.15% of F.S.

Maximum Working Pressure

500 PSIG (Optional 1000 PSIG)

​​500 PSIG (Optional 1000 PSIG)

Settling Time

Typically <1 seconds

​Typically <1 - 2 seconds

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

​​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA

​​​​​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA

Digital I/O (Standard)

​RS-232, RS-485

​​RS-232, RS-485

Analog Connector

15-pin subminiature D

​15-pin subminiature D

​Digital Connector

Dual RJ-12

Dual RJ-12

Power Requirements

​​11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)

​​​11 - 36 VDC @ 6.7 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)

Wetted Materials

​316L SS, Nickel 200, 304 SS, 302 SS

​​316L SS, Nickel 200, 302 SS, 304 SS, Kalrez® (Valve Seat)

 

 

HFM-D-301A / HFC-D-303A

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HFM-D-301A / HFC-D-303A mass flow instruments have flow ranges from 0-25 slm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel.   Easy, user friendly digital communications with windows based software interface available.  Available with a variety of elastomer seals for maximum flexibility.

 


 

​​± (0.5% of reading + 0.2% of full scale) Accuracy

 

Applications and Industries

 

Leak Testing

Thin Film Deposition

High Purity Gas Delivery

Thermal Flame Spray

Gas Blending

Pharmaceutical Process


HFM-D-301A Meter

HFC-D-303A Controller

​Range

(L): 0 - 25 slm to 0 - 300 slm (N2)
(H): 0 - 1000 slm to 0 - 3000 slm

(L): 0 - 25 slm to 0 - 300 slm (N2)
(H): 0 - 1000 slm to 0 - 3000 slm

Accuracy

+ (0.5% of reading + 0.2% of full scale)

+ (0.5% of reading + 0.2% of full scale)

​Repeatability

+ 0.15% of full scale

+ 0.15% of full scale

Maximum Working Pressure

500 PSIG (Optional 1000 PSIG)

​​500 PSIG (Optional 1000 PSIG)

Settling Time

Typically <1 seconds

Typically <1 - 2 seconds

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

0 - 10 VDC, 0-20 mA, 4 - 20 mA

0 - 10 VDC, 0-20 mA, 4 - 20 mA

Digital I/O (Standard)​

​RS-232, RS-485

​​​RS-232, RS-485

​Analog Connector

​15-pin subminiature D

​​​15-pin subminiature D

​Digital Connector

​Dual RJ-12

​​​Dual

J-12

Fittings

Surface Mount, Swagelok®, VCO, VCR, NPT​

Surface Mount, Swagelok®, VCO, VCR, NPT​​

Power Requirements

11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. + 15, + 12 VDC)

11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. + 15, + 12 VDC)

Wetted Materials

​316L SS, Nickel 200, 304 SS, 302 SS

​316L SS, Nickel 200, 304 SS, 302 SS, Kalrez® (Valve Seat)

 

 

HFM-D-305A / HFC-D-307A

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HFM-D-305A / HFC-D-307A mass flow instruments have flow ranges from 0-1000 slm to 0-2500 slm; provide analog and digital outputs, and are constructed of stainless steel.   Easy, user friendly digital communications with windows based software interface available.  Available with a  variety of elastomer seals for maximum flexibility.

 


 

± (0.5% of reading + 0.2% of full scale) Accuracy

 

Applications and Industries

 

Gas Delivery

Fire Dynamics

R&D Studies

Process Gas

 

HFM-D-305A

Meter

HFC-D-307A

Controller

​Range

0 - 1000 slm

to

0 - 2500 slm

0 - 1000 slm

to

0 - 2500 slm

Accuracy

+ (0.5% of reading

+ 0.2% of full scale)

+ (0.5% of reading

+ 0.2% of full scale)

​Repeatability

+ 0.15% of full scale

+ 0.15% of full scale

Maximum Working

Pressure

500 PSIG

​​500 PSIG

​Settling Time

​Typically <1 Seconds

​Typically <1-2 Seconds

Analog I/O

(Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O

(Optional)

0 - 10 VDC

0-20mA

4-20 mA

0 - 10 VDC

0-20mA

4-20mA

Digital I/O

(Standard)​

​RS-232

RS-485

​​​RS-232

RS-485

​Analog Connector

​15-pin

subminiature D

​​​15-pin

subminiature D

​Digital Connector

​Dual RJ-12

​​​Dual RJ-12

Fittings

Surface Mount

Swagelok®

VCO, VCR, NPT

Surface Mount

Swagelok®

VCO, VCR, NPT

Power

Requirements

11-36 VDC

@ 3.1 Watt (max)

Unipolar or Bipolar

(e.g. + 15 VDC

+ 12 VDC)

11-36VDC

@ 3.1 Watt (max)

Unipolar or Bipolar

(e.g. + 15 VDC

+ 12 VDC)

Wetted

Materials

​316L SS

Nickel 200

304 SS, 302 SS

​316L SS

Nickel 200, 304 SS

302 SS

Kalrez® (Valve Seat)

 

HFM-D-306A / HFC-D-308A

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HFM-D-306A / HFC-D-308A mass flow instruments have flow ranges from 0-2500 slm to 0-10000 slm; provide analog and digital outputs, and are constructed of stainless steel.   Easy, user friendly digital communications with windows based software interface available. Available with a variety of elastomer seals for maximum flexibility.

 


 

 

± (0.5% of reading + 0.2% of full scale) Accuracy

 

Applications and Industries

 

Alternate Energy

Fuel Cell R&D

Custody Transfer

 

HFM-D-306A Meter

HFC-D-308A Controller

​Range

0 - 2500 slm to 0 - 10000 slm

0 - 2500 slm to 0 - 10000 slm

Accuracy

+ (0.5% of reading + 0.2% of full scale)

+ (0.5% of reading + 0.2% of full scale)

​Repeatability

+ 0.15% of full scale

+ 0.15% of full scale

Maximum Working Pressure

500 PSIG

​​500 PSIG

Seals

Viton® (Standard), Buna-N

Viton® (Standard), Buna-N

Analog I/O (Standard)

​​0 - 5 VDC

​​0 - 5 VDC

Analog I/O (Optional)

0 - 10 VDC, 0-20 mA, 4 - 20 mA

0 - 10 VDC, 0-20 mA, 4 - 20 mA

Digital I/O (Standard)​

​RS-232, RS-485

​​​RS-232, RS-485

​Analog Connector

​15-pin subminiature D

​​​15-pin subminiature D

​Dingial Connector

​Dual RJ-12

​​​Dual RJ-12

Fittings

Swagelok®

Swagelok®

Power Requirements

+ 12, + 15, + 124 VDC (11 - 36 VDC) 
6.7 W

+ 12, + 15, + 124 VDC (11 - 36 VDC) 
6.7 W

Wetted Materials

​316 SS, 302 SS, Ni 200, Viton® (Optional Buna-N®), PTFE

​316 SS, 302 SS, Ni 200, Viton® (Optional Buna-N®), Kalrez, PTFE

 

 

Titan Technologies, K.K.

8-5-7-301 Minami-Senju, Arakawa-Ku, Tokyo 116-0003 Japan